4-axis cylindrical coordinate vacuum-compatible clean robot FTVHR4000
Optimal for transporting masks and glass substrates in liquid crystal manufacturing equipment, inspection devices, etc.
The FTVHR4000 series clean robot, compatible with mask and glass substrates and designed for four-axis cylindrical coordinate link-type high vacuum applications, is suitable for transporting mask and glass substrates within LCD manufacturing equipment and inspection devices. It transports glass substrates at high speed and high precision through S-curve acceleration and deceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
- Company：ジェーイーエル
- Price：Other
